Scientific and Technical Journal

ELECTROTECHNIC AND COMPUTER SYSTEMS

ISSN Print 2221-3937
ISSN Online 2221-3805
IMPROVING CALIBRATION ACCURACY OF SCANNING ELECTRON MICROSCOPE IN NANOMETER MEASUREMENT RANGE
Abstract:
Proposed improvement of calibration method for scanning electron microscopes in range 10-9-10-6 m, which provides automatic estimations of videoimage scaling factor and effective diameter of electron probe. Proposed method allows automation of calibration process, improves its accuracy and provides implementation of measurement uncertainty concept
Authors:
Keywords
DOI
References
  1. NeyezhmakovK. Development ofnanometrologyin Ukraineusing ofscanning electron microscopes /K. Neyezhmakov// Information proccessing systems. – 2011. – №6 (96) – P.181–184[in Russian].
  2. State system for ensuring unity of measurements. Scanning electron microscopes. Methods of calibration: GOST R 8.636-2007. – [acts from 10/20/2007]. – Moscow: Standartinform, 2008. – 7. – National Standard of the Russian Federation [in Russian].
  3. Novikov Y. Linear measure micrometers and nanometer ranges rovogo distribution centers for electronic and atomic force micro-scopy /Y. Novikov, Y. Ozerin, Y. Plotnikov, A. Rakov, P. Todua // Works of A. Prokhorov institute of general physics. – 2006. – V. 62 – P. 36-76 [in Russian].

 

Published:
Last download:
2017-11-16 11:47:37

[ © KarelWintersky ] [ All articles ] [ All authors ]
[ © Odessa National Polytechnic University, 2014. Any use of information from the site is possible only under the condition that the source link! ]
Яндекс.Метрика