Scientific and Technical Journal

ELECTROTECHNIC AND COMPUTER SYSTEMS

ISSN Print 2221-3937
ISSN Online 2221-3805
COMPUTER NANOSCOPY – STATE AND PERSPECTIVES
Abstract:

Modern instruments for nanoscopy were reviewed and analyzed. Substantiated usage of scanning electron microscopes as instruments for nanoscale objects linear dimensions measuring. Considered basic instruments and methods for scanning electron microscopes accuracy characteristics estimation.

Authors:
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DOI
References

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2.Linear measuremicrometersandnanometerrangesrovogodistributeоncentersforelectronic andatomic forcemicro-scopy /Y.Novikov,Y.Ozerin, Y.Plotnikov,A.Rakov, P. Todua// Works of A.Prokhorov institute of general physics.– 2006. – V.62 –P. 36–76[in Russian].

3. Problemsofgeometriccharacteristicsofthescanning electron microscope electron beam measuring /C. Volk, H. Gornev, Y. Novikov, Y. Plotnikov, A. Rakov, P. Todua // Works of A. Prokhorov institute of general physics.– 2006.– V.62. –P.77–120 [in Russian].

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2017-11-23 03:58:07

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